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Upper Electrode for Plasma Etcher

Plasma etcher upper electrode - Silicon series AC-141S series

Plasma etcher upper electrode　Silicon series, AC-140S series

Nisshinbo

Description

  • Upper electrode of Plasma etching machine
  • There are three types of electrode, single crystal silicon, glassy carbon immersed graphite electrode
  • Very few particle will be released at operation

Upper electrode of Plasma etcher is manufactured by Nisshinbo, there are three kinds of electrode for selection, single crystal silicon, glassy carbon and graphite immersed with glassy carbon. When compare with graphite electrode, graphite immersed with glassy carbon has excellent advantage of very few particle released at operation.
Features
  • advantages of glassy carbon Electrode (AC-140S series) :
    1. excellent flatness
    2. very smooth inner surface and no chipping problem at drilled holes

    3. can offer smaller diameter of apertures (0.3mm) than competitors
    4. Very good flatness and smoothness on electrode surface

    5. excellent cleanness due to the special cleaning process at manufacturing
    6. very low particle generation and longer life
  • advantages of Silicon Plasma Etching Electrode:
    1. Very few particles release contributed by unique drilling technology
    2. Longer life can be got by thicker plate and smaller apertures made with unique technologies
Application
Plasma etcher upper electrode for semiconductor processing
Specification
Please contact us directly for further information
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